High-Temperature Alloys in Semiconductor Industry Solutions

1. Nickel-Based Superalloys

Used in CVD systems, furnace components, and gas delivery lines where high temperatures and corrosive gases are present.

• Inconel® 625: CVD systems, furnace components, gas lines—excellent oxidation and corrosion resistance

• Inconel® 718: High-temperature fasteners, springs, vacuum furnace components—strength up to 650°C

• Hastelloy® C-276: Wet etching, cleaning systems—exceptional resistance to HCl, HF, and aggressive chemicals

• Haynes® 214: Diffusion furnaces, oxidation tubes—superior oxidation resistance up to 1100°C

• Nimonic® 75 & 90: Furnace fixtures, thermocouple sheaths—thermal stability and dimensional accuracy

UNS N06625 / Alloy 625 / 2.4856	UNS N07718 / Alloy 718 / 2.4668	UNS N10276 / Alloy C-276 / 2.4819	UNS N07214 / Alloy 214

2. Cobalt-Based Superalloys

Selected for wear resistance and high-temperature stability in moving components.

• Alloy 6B: Valve seats, pump components, wear pads—galling resistance at elevated temperatures

• Haynes® 188: Furnace components, heat shields—oxidation resistance up to 1095°C

• MP159: High-reliability fasteners, springs in vacuum systems—ultra-high strength (265 ksi)

UNS R30016 / Cobalt Alloy 6B	UNS R30188 / Alloy 188 / 2.4683	UNS R30159 / MP159 Cobalt Alloy

3. Titanium Alloys

Chosen for purity and corrosion resistance in wet processes and chemical delivery.

• Grade 2 Titanium: Wet etch tanks, chemical delivery systems—excellent corrosion resistance to acids

• Grade 5 (Ti-6Al-4V): Vacuum components, gas delivery modules—high strength with corrosion resistance

• Grade 7 (Ti-0.2Pd): Aggressive chemical processes—superior resistance in reducing acids

Grade 2 Pure Titanium - UNS R50400	Titanium Grade 5 - Ti-6Al-4V - UNS R56400	Titanium Grade 7 - Ti-0.2Pd - UNS R52400

4. Stainless Steels

Versatile solutions for process equipment, gas panels, and cleanroom components.

• 304L / 316L: Gas panels, piping, enclosures—316L offers enhanced chloride resistance

• 321 / 347: High-temperature welded structures, furnace exhaust—stabilized against sensitization

• 15-5 PH / 17-4 PH: High-strength fasteners, actuators—precipitation-hardening grades

• 254 SMO / AL-6XN: Wet etch systems, aggressive chloride environments—superior pitting resistance

304L Stainless Steel / 1.4307	321 Stainless Steel / 1.4541	17-4PH / AISI 630 / UNS S17400	15-5PH / UNS S15500 / XM-12	254 SMO / UNS S31254 / 1.4547	AL-6XN / UNS N08367 / 1.4529

5. Applications by Process

6. Selection Factors

ZYTC Alloy supplies certified nickel, cobalt, titanium, and stainless steel alloys for semiconductor equipment, meeting industry purity and performance standards with full traceability.

Contact us for technical datasheets and competitive pricing.